Chuyên nghiệp Stylus Surface Profiler
A Professional Stylus Surface Profiler is a high-precision measurement instrument designed for accurate surface roughness and profile analysis of industrial components. The Professional Stylus Surface Profiler uses a diamond stylus sensor to trace micro-surface variations with exceptional resolution, converting physical surface texture into precise digital data. The Professional Stylus Surface Profiler is ideal for applications requiring strict surface quality evaluation and repeatable measurement accuracy in modern manufacturing environments.
- Đo lường: Công nghệ định hình đầu dò
- Cảm biến đầu dò: Low inertia sensor (LIS3)
- Áp suất thăm dò: Using LIS3 sensor: 1 to 15mg
- Chế độ xem mẫu: Selectable magnification, 1 to 4mm FOV
Mô tả Sản phẩm
The Professional Stylus Surface Profiler integrates advanced measurement technology with a stable and user-friendly platform, delivering precise surface characterization for modern laboratories and production environments. It offers excellent accuracy, reliable repeatability, and efficient operation, making it suitable for both research and industrial quality control applications.
Designed for high-resolution surface analysis, this system supports nanoscale roughness, step height, and 3D topography measurement. It is widely used in microelectronics, semiconductors, display manufacturing, solar energy, thiết bị y tế, and advanced materials research, helping users achieve superior process control from R&D to final inspection.
Professional Stylus Surface Profiler – Nanometer-Level Step Height & Surface Roughness Measurement
The Professional Stylus Surface Profiler is a high-precision contact measurement system designed for accurate analysis of step height, surface roughness, and 3D surface topography. Using a diamond stylus that gently traces the sample surface, it captures fine surface variations with exceptional resolution and stability. This ensures highly reliable and repeatable measurement results for demanding industrial and laboratory applications.
Cách thức hoạt động
The system operates based on a contact-style measurement method. As the stylus moves along the surface, its vertical displacement mirrors the surface contours. This movement is captured as an electrical signal through a measuring bridge, generating an amplitude-modulated output proportional to the vertical displacement. The signal is then amplified, processed through phase-sensitive rectification, and filtered to remove noise and waviness. This ensures that the final output is a clean and stable signal, providing accurate step height and roughness measurements free from external interference and waviness.
Các ứng dụng chính
- Semiconductor Wafer Metrology: Precise measurement and analysis of semiconductor wafers to ensure high-quality fabrication.
- MEMS and Microstructures: Accurate profiling of MEMS (Micro-Electro-Mechanical Systems) and microstructures for detailed surface measurements.
- Thin Film and Coating Thickness: Evaluation of the thickness and uniformity of thin films and coatings, critical for various manufacturing processes.
- Solar Cell Surface Profiling: Accurate surface measurements for solar cells, optimizing performance and manufacturing quality.
- Precision Optics and Medical Devices: Measurement of precision optics and medical devices to maintain high standards of quality and performance.
Các tính năng chính
- Stable Performance: Ensures consistent operation with fast transmission, automatic calibration, and accurate measurement.
- Revolutionary Desktop Design: Achieves a balance of high performance, ease of use, and cost-effectiveness in a compact benchtop setup.
- Nhỏ gọn & Reliable Design: Optimized hardware configuration ensures high testing accuracy, Sự ổn định, and efficiency.
- Superior Materials & Độ bền: Crafted with high-quality materials to ensure durability, tuổi thọ dài, and efficient performance.
Tính năng thiết bị
- Unrivaled Performance: Step height reproducibility below 4A, with enhanced scanning capabilities.
- Single-Arch Design: Provides breakthrough stability, minimizing ambient noise interference, and enabling a large vertical range with low-force scanning.
- Upgraded Smart Electronics: Reduces noise and enhances measurement accuracy, capable of measuring step heights below 10nm.
- Optimized Hardware Configuration: Reduces data acquisition time by 40%, improving measurement efficiency.
- 64-bit Vision64 Synchronous Software: Accelerates data processing, increasing data analysis speed by 10x.
- Intuitive User Interface: Vision64 software offers a simplified, user-friendly interface for easier setup and analysis.
- Automatic Tip Alignment System: Simplifies probe changes with self-aligning probe assembly, reducing risks during transition.
- Wide Range of Probe Models: Offers various probe sizes and shapes, ensuring compatibility with nearly any application.
- Single Sensor Design: Delivers low-force measurements with a wide scanning range on a single plane.
- High Throughput Testing: Ensures quick, multi-sample testing for precise thin film measurements with superior repeatability.
Các thông số kỹ thuật
| Công nghệ đo lường | Công nghệ định hình đầu dò |
| Chức năng đo lường | Đo hồ sơ bề mặt 2D |
| Đo lường 3D tùy chọn/ | |
| Chế độ xem mẫu | Selectable magnification, 1 to 4mm FOV |
| Cảm biến đầu dò | Low inertia sensor (LIS3) |
| Áp suất thăm dò | Using LIS3 sensor: 1 to 15mg |
| Low Force (Tùy chọn) | Using N-Lite+ low force sensor: 0.03 to 15mg |
| Tùy chọn đầu dò | Probe curvature radius selectable range: 50nm to 25μm; |
| Height-to-diameter ratio (HAR) tips: 10μm*2μm and 200μm*20μm; | |
| Custom tips are available upon request. | |
| Giai đoạn X / Y mẫu | Manual X-Y translation: 100mm (4 inches) |
| Motorized X-Y translation: 150mm (6 inches) | |
| Giai đoạn quay mẫu | Manual, 360° rotation; |
| Motorized: 360° rotation; | |
| Hệ thống máy tính | 64-bit multi-core line processor, Windows* 7.0; Optional 23-inch flat panel display |
| Phần mềm | Vision64 operation and analysis software; |
| Stress measurement software: Cantilever deflection; | |
| Suturing software: 3D scanning imaging software | |
| Thiết bị giảm rung | Giảm xóc có sẵn |
| Phạm vi độ dài quét | 55mm (2 inches) |
| Điểm dữ liệu mỗi lần quét | Up to 120,000 data points |
| Độ dày mẫu tối đa | 50mm (2 inches) |
| Kích thước wafer tối đa | 200mm (8 inches) |
| Khả năng tái tạo chiều cao bước | <4A1σ on a 1μm step |
| Phạm vi dọc | 1mm (0.039 inches) |
| Độ phân giải dọc | Maximum 1A (at 6.55μm vertical range) |
| Đầu vào Voltage | 100 - 240 VAC, 50 - 60Hz |
| Phạm vi nhiệt độ | Operating Range 20 to 25°C (68 to 77°F) |
| Phạm vi độ ẩm | ≤80%, Non-condensing |
| Kích thước và trọng lượng hệ thống | Rộng 455mm x 550mm Sâu x Cao 370mm |
| (179in. W x 22.6in. D x 14.5in. H); | |
| 34 kg (75 lbs); | |
| Attachment: 550mm L x 585mm W x 445mm H (216in. L x 23in. W x 175in. H); | |
| 217 kg (48 lbs) |
Các trường hợp ứng dụng
- Thin Film Testing – Ensuring High Yields:
In semiconductor manufacturing, Step instrument helps monitor deposition and etching uniformity, thin film stress, and ITO thin film thickness. Its high reproducibility ensures accurate measurement, optimizing etching and deposition for better yields. - Surface Roughness Inspection – Ensuring Performance:
Ideal for assessing surface roughness in precision components across industries like automotive, hàng không vũ trụ, and medical devices. Ví dụ, it measures the roughness of orthopedic implant coatings to ensure product quality and adhesion. - Solar Grid Line Analysis – Reducing Manufacturing Costs:
Perfect for measuring the dimensions of conductive silver grid lines on solar panels. Step instrument ensures that silver usage is optimized for better conductivity, contributing to cost-saving in solar panel production. - Microfluidics Technology – Detecting Design and Performance:
Used in MEMS and microfluidics technology for qualification testing. The low-force NLite+ measurement function enables precise detection of vertical steps and roughness on photosensitive materials, ensuring design accuracy and performance.

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Được hỗ trợ bởi hơn 25 năm kinh nghiệm kỹ thuật, Đội ngũ của chúng tôi cung cấp dịch vụ toàn diện—từ thiết kế khuôn tùy chỉnh, gia công chính xác đến sản xuất quy mô lớn—được hỗ trợ bởi hệ thống đảm bảo chất lượng vững chắc và dịch vụ khách hàng chủ động. Được chứng nhận theo ISO9001, ISO14001, và IATF 16949, Chúng tôi không ngừng nỗ lực hướng tới sự xuất sắc về chất lượng, Đổi mới, và sự hài lòng của khách hàng.
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